Preparation of ordered nanohole array structures by anodization of prepatterned Cu, Zn, and Ni

Anodic porous oxides with ordered nanohole array structures were prepared by the formation of concave arrays on the surface of Cu, Zn, and Ni substrates and the subsequent anodization of the prepatterned substrates. The concave arrays on the surface of the substrate were formed by Ar ion milling using an alumina mask. Although the anodization of Cu, Zn, and Ni substrates without prepatterning generates spongelike porous structures, ordered arrays of cylindrical nanoholes were obtained by the anodization of prepatterned substrates. The interpore distance of the obtained nanohole arrays was controlled by changing the period of the concave arrays. Crystallized ordered nanohole arrays of Cu₂O, ZnO, and NiO were also obtained by heat treatment. The obtained anodic porous oxide with ordered nanohole array structures can be used for various applications such as photocatalysts, solar cells, and sensors.