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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
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An open source three-mirror laser scanning holographic two-photon lithography system
Marco Pisanello1, Di Zheng1, Antonio Balena1
1Center for Biomolecular Nanotechnologies - Istituto Italiano di Tecnologia, Arnesano (LE), Italy.
Plos One
|April 15, 2022
Summary
We developed an open-source holographic multibeam two-photon polymerization system. This advanced fabrication tool enables faster, large-area micro and nano-fabrication with high resolution.
Area of Science:
- Microfabrication
- Additive Manufacturing
- Photonics
Background:
- Two-photon polymerization (TPP) is a key technique for creating 3D microstructures with sub-diffraction-limit resolution.
- Existing TPP systems often face limitations in writing field of view and speed for large-area fabrication.
Purpose of the Study:
- To present an open-hardware and open-software holographic multibeam TPP system.
- To enhance the writing field of view and fabrication speed for advanced micro and nano-fabrication.
Main Methods:
- Design and implementation of a custom holographic multibeam TPP system.
- Utilizing a phase-only spatial light modulator and a novel three-mirror scanhead.
- Overcoming virtual conjugation loss for extended holographic projection.
Main Results:
- Achieved an extended writing field of view of approximately 400μm on one axis, doubling the conventional range.
- Maintained a small voxel size of ~250nm × ~1050nm (lateral × axial).
- Demonstrated a writing speed of 2000 voxels/s with three simultaneous beams.
Conclusions:
- The developed system offers a powerful and reliable solution for large-area micro and nano-fabrications.
- The open-hardware and open-software approach promotes accessibility and further development in the field.
- This advancement significantly improves the efficiency and scope of holographic multibeam TPP.

