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Method for Film Thickness Mapping with an Astigmatic Optical Profilometer.

Hsien-Shun Liao1, Shih-Han Cheng1, En-Te Hwu2

  • 1Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.

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|April 23, 2022
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Summary

This study introduces a new method using astigmatic optical profilometry to measure transparent thin film thickness. The technique accurately captures subsurface information, overcoming previous limitations for films as thin as 18 micrometers.

Keywords:
astigmatismoptical profilometerthickness measurement

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Area of Science:

  • Optical engineering
  • Materials science
  • Metrology

Background:

  • Astigmatic optical profilometers are advanced tools for surface analysis, offering high resolution and bandwidth.
  • Current applications are limited to surface morphology, neglecting potential for subsurface analysis.
  • Transparent thin film thickness measurement is crucial in various industries.

Purpose of the Study:

  • To develop and validate a novel method for measuring transparent thin film thickness using astigmatic optical profilometry.
  • To extend the capabilities of astigmatic optical profilometers beyond surface morphology.
  • To address challenges in measuring thin films and demonstrate 3D imaging of both surfaces.

Main Methods:

  • Development of a modified astigmatic optical profilometer setup.
  • Implementation of a decoupling method to overcome coupling issues for thinner films.
  • Experimental validation using transparent films of varying thicknesses.

Main Results:

  • Accurate measurement of transparent thin film thickness, with demonstrated capability for films tens of micrometers thick.
  • Successful measurement of an 18-μm-thick film using the devised decoupling method.
  • Demonstration of 3D imaging, capturing both upper and lower surfaces of the films.

Conclusions:

  • Astigmatic optical profilometry can be effectively utilized for precise transparent thin film thickness measurements.
  • The developed method expands the application scope of astigmatic optical profilometers to subsurface analysis.
  • This technique offers a cost-effective and high-resolution solution for thin film characterization.