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    Area of Science:

    • Optical Engineering
    • Metrology
    • Surface Metrology

    Background:

    • Large optical flats are crucial components in advanced optical systems.
    • Accurate surface shape error testing is essential for fabricating large optical flats.
    • Traditional Ritchey-Common tests have limitations, requiring specific F/# and distance invariance.

    Purpose of the Study:

    • To propose a novel virtual-real combination Ritchey-Common interferometry method.
    • To overcome the limitations of traditional testing methods for large optical flats.
    • To achieve high-accuracy surface shape error measurement with greater design freedom.

    Main Methods:

    • Development of a virtual-real combination Ritchey-Common interferometry.
    • Accurate modeling of the optical path within a virtual interferometer.
    • Implementation of a virtual-real combination iterative algorithm to relax distance invariance.

    Main Results:

    • Experimental validation on 100 mm and 422 mm flats demonstrated feasibility.
    • Achieved peak-to-valley (PV) and root mean square (RMS) errors below 0.1 λ and 0.01 λ, respectively.
    • Numerical simulations confirmed RMS errors below 0.01 λ for various Zernike aberrations and F/#.

    Conclusions:

    • The proposed method successfully breaks the flat-to-interferometer distance invariance restriction.
    • High accuracy is achieved with arbitrary F/#, offering substantial freedom in test configuration design.
    • This technique provides a flexible solution for testing large optical flats in diverse scenarios.