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Polymer/glass hybrid DC-MZI thermal optical switch for 3D-integrated chips
Yue Cao1, Yun-Ji Yi1, Bai-Zhu Lin1
1State Key Laboratory of Integrated Optoelectronics, College of Electronic Science & Engineering, Jilin University Changchun 130012 PR China zhangdm@jlu.edu.cn.
RSC Advances
|May 6, 2022
Summary
This study demonstrates a novel hybrid polymer-glass thermal optical switch for 3D chips. The device offers low power consumption and fast switching, enhancing integrated photonic devices.
Area of Science:
- Photonics and Optical Engineering
- Materials Science for Integrated Circuits
Background:
- Three-dimensional (3D) integration demands advanced optical switching solutions.
- Hybrid material approaches offer complementary advantages for waveguide devices.
Purpose of the Study:
- To demonstrate a directional coupler (DC) Mach-Zehnder interferometer (MZI) thermal optical switch using a polymer and glass waveguide hybrid.
- To leverage vertical coupling for enhanced integration on 3D chips.
Main Methods:
- Fabrication of a hybrid polymer and glass waveguide using ion-exchange.
- Simulation of optical field coupling in 3D for optimization.
- Characterization of thermal optical switch performance, including power consumption and response times.
Main Results:
- Achieved optimized optical coupling efficiency of 99.82%.
- Demonstrated low switch power consumption (3.74 mW with air trench).
- Obtained fast response times (128.8 μs rising, 249.5 μs falling without air trench).
Conclusions:
- The hybrid polymer-glass waveguide DC-MZI thermal optical switch is suitable for 3D-integrated photonic chips.
- The design offers a balance of low power consumption, small dimensions, and fast response.
- Vertical coupling enhances integration density and performance.

