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Updated: Sep 24, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
X-ray Spectrometry in the Era of Aberration-Corrected Electron Optical Beam Lines
1Photon Sciences Directorate, Argonne National Laboratory, Lemont, IL, USA.
Abstract:
Aberration correction in the analytical transmission electron microscope is most closely associated with improvements in high-resolution imaging. In this paper, the combination of that technology with new system designs, which optimize both electron optics and x-ray detection, is shown to provide more than a tenfold increase in performance over the last 25 years.
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