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Updated: Sep 23, 2025

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy
Published on: April 21, 2022
Micro-to-nanometer patterning of solution-based materials for electronics and optoelectronics
Yo-Han Suh1, Dong-Wook Shin1, Young Tea Chun1
1Electrical Engineering Division, Department of Engineering, University of Cambridge 9 JJ Thomson Avenue Cambridge CB3 0FA UK ytc24@cam.ac.uk.
Abstract:
Technologies for micro-to-nanometer patterns of solution-based materials (SBMs) contribute to a wide range of practical applications in the fields of electronics and optoelectronics. Here, state-of-the-art micro-to-nanometer scale patterning technologies of SBMs are disseminated. The utilisation of patterning for a wide-range of SBMs leads to a high level of control over conventional solution-based film fabrication processes that are not easily accessible for the control and fabrication of ordered micro-to-nanometer patterns. In this review, various patterning procedures of SBMs, including modified photolithography, direct-contact patterning, and inkjet printing, are briefly introduced with several strategies for reducing their pattern size to enhance the electronic and optoelectronic properties of SBMs explained. We then conclude with comments on future research directions in the field.

