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Updated: Sep 22, 2025

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Bridging Fidelities to Predict Nanoindentation Tip Radii Using Interpretable Deep Learning Models
Claus O W Trost1, Stanislav Zak1, Sebastian Schaffer2,3
1Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, 8700 Leoben, Austria.
Abstract:
As the need for miniaturized structural and functional materials has increased, the need for precise materials characterizaton has also expanded. Nanoindentation is a popular method that can be used to measure material mechanical behavior which enables high-throughput experiments and, in some cases, can also provide images of the indented area through scanning. Both indenting and scanning can cause tip wear that can influence the measurements. Therefore, precise characterization of tip radii is needed to improve data evaluation. A data fusion method is introduced which uses finite element simulations and experimental data to estimate the tip radius in situ in a meaningful way using an interpretable multi-fidelity deep learning approach. By interpreting the machine learning models, it is shown that the approaches are able to accurately capture physical indentation phenomena.

