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Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS

Lei Wang1, Haiyun Liu2, Xing Liu1

  • 1Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.

Micromachines
|May 28, 2022
PubMed

Keywords:
electron irradiationgrain boundary evolutionpolycrystalline silicon

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