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Updated: Sep 21, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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THz MEMS Switch Design

Yukang Feng1, Han-Yu Tsao1, N Scott Barker1

  • 1Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904, USA.

Micromachines
|May 28, 2022
PubMed

Keywords:
MEMSmillimeter-waveswitchterahertztransmission line model

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