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THz MEMS Switch Design.

Yukang Feng1, Han-Yu Tsao1, N Scott Barker1

  • 1Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904, USA.

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|May 28, 2022
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Summary
This summary is machine-generated.

This study presents a micro-electro-mechanical systems (MEMS) switch design for mmWave/THz frequencies. Tested up to 750 GHz, the switches demonstrate low insertion loss and high isolation, validating the design process.

Keywords:
MEMSmillimeter-waveswitchterahertztransmission line model

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Area of Science:

  • Electrical Engineering
  • Materials Science
  • Microwave Engineering

Background:

  • Micro-electro-mechanical systems (MEMS) switches are crucial for high-frequency applications.
  • Designing and fabricating reliable MEMS switches for millimeter-wave (mmWave) and terahertz (THz) frequencies presents significant challenges.
  • Optimizing electrical design, modeling, fabrication, and testing is essential for performance.

Purpose of the Study:

  • To present a comprehensive design process for mmWave/THz MEMS switches.
  • To explore and address the challenges encountered during the design, modeling, fabrication, and testing phases.
  • To validate the developed design process through experimental testing on silicon and fused quartz substrates.

Main Methods:

  • Development of a detailed electrical design and simulation methodology for MEMS switches.
  • Implementation of fabrication processes suitable for both silicon and fused quartz substrates.
  • Extensive testing of fabricated MEMS switches within the 140-750 GHz frequency range.

Main Results:

  • The fabricated MEMS switches exhibited performance consistent with design expectations and simulations.
  • Switches on both silicon and fused quartz substrates achieved an insertion loss below 3 dB in the ON state at 750 GHz.
  • An OFF state isolation exceeding 12 dB was measured at 750 GHz for switches on both substrates.

Conclusions:

  • The presented design process is feasible and effective for creating high-performance mmWave/THz MEMS switches.
  • The experimental results validate the accuracy of the design and simulation models.
  • The developed MEMS switches show promising performance for applications in the 140-750 GHz spectrum.