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Silicon-Controlled Rectifier Embedded Diode for 7 nm FinFET Process Electrostatic Discharge Protection

Xinyu Zhu1, Shurong Dong1, Fangjun Yu1

  • 1Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 310027, China.

Nanomaterials (Basel, Switzerland)
|May 28, 2022
PubMed

Keywords:
ESDFinFETdiodesilicon-controlled rectifier

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