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Updated: May 2, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Yuehai Mei1, Wenmao Huang1, Weishuai Di1,2
1Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China.
We developed mechanochemical lithography (MCL) for patterning biomolecules on surfaces. This method uses force-triggered reactions for stable, nanoscale patterns in aqueous conditions, advancing biochip and diagnostic applications.
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