Quantifying the Interface Energy of Block Copolymer Top Coats

Daniel F Sunday1, Michael J Maher, Summer Tein

  • 1Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States.

ACS Macro Letters
|June 2, 2022
PubMed
Summary

Controlling block copolymer (BCP) orientation is key for nanomanufacturing. Top coats can be designed to achieve neutral interfaces, promoting perpendicular lamellar alignment for advanced BCP lithography applications.