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Updated: Sep 20, 2025

Dosimetry for Cell Irradiation using Orthovoltage 40-300 kV X-Ray Facilities
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Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity

Alexander A Svintsov1, Maxim A Knyazev1, Sergey I Zaitsev1

  • 1Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, St. Academician Osipyan, 6, 142432 Moscow, Russia.

Materials (Basel, Switzerland)
|June 10, 2022
PubMed

Keywords:
Monte Carlo methodelectron-beam lithographyelectrons scatteringproximity function

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