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Wafer-Level Vacuum-Packaged Electric Field Microsensor: Structure Design, Theoretical Model, Microfabrication, and
Jun Liu1,2, Shanhong Xia1,2, Chunrong Peng1
1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Micromachines
|June 24, 2022
Summary
This study introduces a novel wafer-level vacuum-packaged electric field microsensor (EFM) with high performance and low power. The innovative design utilizes a silicon-on-insulator conductive handle layer for efficient electric field sensing.
Area of Science:
- Microelectromechanical systems (MEMS)
- Sensor technology
- Solid-state physics
Background:
- Electric field microsensors (EFMs) are crucial for various applications.
- Existing EFMs often face challenges with performance, power consumption, and manufacturing complexity.
- Need for advanced microsensors with improved sensitivity, stability, and efficiency.
Purpose of the Study:
- To propose and demonstrate a novel wafer-level vacuum-packaged electric field microsensor (EFM).
- To achieve high quality factor, low driving voltage, low noise, and low power consumption.
- To validate the performance through theoretical modeling and experimental characterization.
Main Methods:
- Utilized a silicon-on-insulator (SOI) conductive handle layer as the sensing channel.
- Implemented wafer-level vacuum packaging via anodic bonding between SOI and glass-on-silicon (GOS).
- Developed a theoretical model to analyze packaging parameters and conducted experimental performance characterization.
Main Results:
- Achieved a high quality factor (>5000) sustained over 50 days.
- Required only 0.05 Vp AC driving voltage with 4.2 mV feedthrough under 5 V DC bias.
- Demonstrated a sensitivity of 0.16 mV/(kV/m) within the 0-50 kV/m range, with 1.62% linearity.
Conclusions:
- The developed wafer-level vacuum-packaged EFM offers superior performance characteristics.
- The innovative use of SOI and GOS with vacuum packaging enables efficient batch manufacturing.
- This EFM is suitable for applications requiring precise and low-power electric field measurement.
