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Diffraction Efficiency of MEMS Phase Light Modulator, TI-PLM, for Quasi-Continuous and Multi-Point Beam Steering
Xianyue Deng1, Chin-I Tang1, Chuan Luo1
1James C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USA.
Micromachines
|June 24, 2022
Summary
A new Micro Electromechanical System (MEMS) Phase Light Modulator (PLM) allows fast, non-iterative laser beam steering for lidar. This technology enables deterministic Computer-Generated Holograms (CGHs) for efficient beam scanning without raster patterns.
Area of Science:
- Optics and Photonics
- Microelectromechanical Systems (MEMS)
Background:
- Traditional lidar systems often rely on mechanical scanning, limiting speed and increasing complexity.
- Iterative algorithms for Computer-Generated Holograms (CGHs) can be computationally intensive and slow.
Purpose of the Study:
- To investigate the application of a Micro Electromechanical System (MEMS) Phase Light Modulator (PLM) for fast laser beam steering in lidar.
- To demonstrate quasi-continuous beam steering using deterministically calculated CGHs with a MEMS PLM.
- To analyze the impact of non-equally spaced phase levels on diffraction efficiency.
Main Methods:
- Utilized a Texas Instruments MEMS PLM for laser beam modulation.
- Employed a deterministic CGH calculation algorithm, avoiding iterative methods.
- Quantified the diffraction efficiency concerning PLM phase level spacing.
- Experimentally demonstrated multi-point beam steering and scanning capabilities.
Main Results:
- Achieved quasi-continuous laser beam steering using a MEMS PLM and deterministic CGHs.
- Demonstrated that non-equally spaced phase levels affect diffraction efficiency.
- Successfully steered and scanned a laser beam to multiple regions of interest points.
- Enabled lidar beam steering without sequential raster scanning.
Conclusions:
- The MEMS PLM is a viable technology for fast, non-iterative laser beam steering in lidar applications.
- Deterministic CGH calculation offers an efficient alternative to iterative methods for PLM-based beam steering.
- This approach facilitates rapid scanning of multiple lidar points, enhancing system performance.

