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Finite time stable inversion in discrete frequency domain: Accuracy analysis, improvement and application to wafer

Li Li1, Yang Liu2, Xuewei Fu3

  • 1Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China.

ISA Transactions
|July 5, 2022
PubMed

Keywords:
Feedforward controlModel inversionMotion controlNon-minimum phase systemsStable inversion

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