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An Optical Fiber Sensing Method for Measuring the Surface Flatness of an Object
Weijia Zhang1, Qiancheng Rao1, Zhenjie Gu1
1College of Electronic Information and Automation, Tianjin University of Science and Technology, Tianjin 300457, China.
Computational Intelligence and Neuroscience
|July 7, 2022
Summary
This study introduces a non-destructive reflection interference spectrum method for precise surface flatness measurement. The optical fiber sensor accurately maps surface topography for objects between 0.4 and 16 μm thick.
Area of Science:
- Materials Science
- Optical Engineering
- Metrology
Background:
- Accurate and precise measurement of object surfaces is crucial in various scientific and industrial applications.
- Existing sensing techniques may have limitations in terms of destructiveness, lateral range, or system complexity.
- The development of advanced sensing technologies is essential for detailed surface analysis.
Purpose of the Study:
- To present a novel method for measuring the flatness and surface topography of objects using reflection interference spectroscopy.
- To evaluate the accuracy and reliability of this non-destructive measurement technique for thin objects.
- To demonstrate a simple yet effective system for continuous surface profiling.
Main Methods:
- Utilized the reflection interference spectrum method to analyze surface characteristics.
- Employed an optical fiber sensor to scan the object's surface, measuring reflection spectra at discrete points.
- Integrated a stepping motor for continuous movement and thickness measurement across the surface.
- Applied artificial intelligence-based techniques for data analysis and interpretation.
Main Results:
- Successfully measured the flatness of object surfaces with thicknesses ranging from 0.4 to 16 μm.
- Achieved high test accuracy and reliable results, providing detailed surface topography.
- Demonstrated a non-destructive testing approach with no lateral test range limitations.
- Confirmed a simple test system structure suitable for practical implementation.
Conclusions:
- The reflection interference spectrum method offers a highly accurate and reliable approach for non-destructive surface flatness measurement.
- This technique enables detailed surface topography mapping for thin objects.
- The system's simplicity and lack of lateral limitations make it a versatile tool for metrology.
