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Trench FinFET Nanostructure with Advanced Ferroelectric Nanomaterial HfZrO2 for Sub-60-mV/Decade Subthreshold Slope

Siao-Cheng Yan1, Chen-Han Wu1, Chong-Jhe Sun1

  • 1Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan.

Nanomaterials (Basel, Switzerland)
|July 9, 2022
PubMed

Keywords:
FeFETFinFEThafnium zirconium oxidesteep slopetrench

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