Related Experiment Video
Updated: Sep 5, 2025

15:25
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
6.2K
Miniaturization of Laser Doppler Vibrometers-A Review
Yanlu Li1,2, Emiel Dieussaert1,2, Roel Baets1,2
1Photonics Research Group, Ghent University-Imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, Belgium.
Sensors (Basel, Switzerland)
|July 9, 2022
Summary
Miniaturized Laser Doppler Vibrometry (LDV) systems are advancing vibration measurement. This review explores photonic integrated circuits, self-mixing, and MEMS for smaller, more versatile LDV applications.
Area of Science:
- Optics and Photonics
- Measurement Science
- Micro-engineering
Background:
- Laser Doppler Vibrometry (LDV) is a non-contact vibration measurement technique.
- Its high resolution and flexibility have led to widespread applications.
- Miniaturization is a key development for enabling new LDV applications.
Purpose of the Study:
- To review state-of-the-art methods for LDV miniaturization.
- To discuss systems based on photonic integrated circuits (PIC), self-mixing, and micro-electromechanical systems (MEMS).
- To compare the advantages and disadvantages of these miniaturization techniques.
Main Methods:
- Review of existing literature on miniaturized LDV systems.
- Explanation of the fundamental principles behind PIC, self-mixing, and MEMS for LDV.
- Comparative analysis of reported systems.
Main Results:
- Identification of PIC, self-mixing, and MEMS as primary techniques for LDV miniaturization.
- Summary of various miniaturized LDV system implementations.
- Discussion of the trade-offs associated with each technique.
Conclusions:
- Miniaturization of LDV systems is crucial for expanding their application scope.
- PIC, self-mixing, and MEMS offer distinct approaches to achieving smaller LDV devices.
- Understanding the pros and cons of each method guides future development.

