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Microvalve array fabrication using selective PDMS (polydimethylsiloxane) bonding through
Zachary Estlack1, Jungkyu Kim2
1Department of Mechanical Engineering, University of Utah, Salt Lake City, UT, 84112, USA.
Scientific Reports
|July 20, 2022
Summary
A new chemical passivation technique using perfluorooctyl-trichlorosilane (PFTCS) prevents sticking in polydimethylsiloxane (PDMS) microfluidic valves. This enhances the reliability of programmable microfluidic arrays (PMAs) for long-term space exploration, proven by three-year testing and a rocket flight test.
Area of Science:
- Materials Science
- Microfluidics
- Aerospace Engineering
Background:
- Microfluidic analytical devices require robust, normally closed valves to prevent contamination and leakage.
- Long-term space missions necessitate microfluidic systems that maintain performance under harsh conditions.
- Polydimethylsiloxane (PDMS) microfluidic valves are prone to sticking and bonding over time, limiting their use.
Purpose of the Study:
- To develop a stable fabrication method for polydimethylsiloxane (PDMS) microfluidic valves.
- To overcome PDMS sticking issues for long-term space exploration applications.
- To enhance the versatility and robustness of programmable microfluidic arrays (PMAs) for space missions.
Main Methods:
- Selective chemical passivation of PDMS substrates using vaporized perfluorooctyl-trichlorosilane (PFTCS).
- Optimized PFTCS deposition and transfer parameters: 150 °C and 15 minutes for optimal transfer.
- Fabrication and testing of a programmable microfluidic array (PMA) using the developed passivation technique.
Main Results:
- Successfully demonstrated the fabrication of PMAs with selective PDMS bonding.
- Three years of regular testing showed no stiction or performance alteration in the PFTCS-treated PMAs.
- A flight test confirmed no performance degradation after exposure to high g-force and vibration during rocket launch and landing.
Conclusions:
- Chemical passivation with PFTCS provides a simple and robust method to prevent PDMS valve sticking.
- The technique significantly enhances the stability and capability of PMAs for long-term space exploration.
- This advancement promises to expand the application of microfluidic devices in demanding environments.

