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Updated: Sep 3, 2025

Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles
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High-Frequency and Spectrum-Clean Shear-Horizontal Acoustic Wave Resonators with AlN Overlay

Zonglin Wu1, Shuxian Wu1, Feihong Bao1

  • 1The Key Laboratory for Information Science of Electromagnetic Waves, School of Information Science and Technology, Fudan University, Shanghai 200438, China.

Micromachines
|July 27, 2022
PubMed

Keywords:
6GLiNbO3aluminum nitridecoupling coefficientshear-horizontal mode

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