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SAW Resonators and Filters Based on Sc0.43Al0.57N on Single Crystal and Polycrystalline Diamond
Miguel Sinusia Lozano1,2, Laura Fernández-García3,4, David López-Romero5
1Institute for Optoelectronic Systems and Microtechnology, Universidad Politécnica de Madrid, Avenida Complutense, 30, 28040 Madrid, Spain.
Micromachines
|July 27, 2022
Summary
Surface acoustic wave (SAW) devices using Sc0.43Al0.57N on diamond substrates demonstrate excellent performance for 5G technology. These SAW resonators and filters exhibit high frequencies and bandwidths, meeting demands for advanced mobile communications.
Area of Science:
- Materials Science
- Electrical Engineering
- Acoustics
Background:
- Modern mobile communication demands devices with high electrical performance and stability under diverse conditions.
- Surface acoustic wave (SAW) devices offer high Q-factors, thermal/chemical stability, and low propagation losses, making them suitable for demanding applications.
Purpose of the Study:
- To fabricate and evaluate SAW resonators and filters using Sc0.43Al0.57N on diamond substrates.
- To assess the suitability of these SAW devices for next-generation mobile communication technologies like 5G.
Main Methods:
- Synthesis of Sc0.43Al0.57N thin films via reactive magnetron sputtering.
- Fabrication of SAW resonators and filters on single crystal and polycrystalline diamond substrates.
- Characterization of device performance, including electromechanical coupling coefficients and frequency response.
Main Results:
- SAW resonators exhibited high electromechanical coupling for Rayleigh (1.2 GHz) and Sezawa (2.3 GHz) modes.
- SAW filters on Sc0.43Al0.57N/diamond heterostructures operated above 4.7 GHz with ~200 MHz bandwidths.
Conclusions:
- Sc0.43Al0.57N-based SAW devices on diamond heterostructures are promising for 5G technology.
- The demonstrated high-frequency operation and bandwidths meet the stringent requirements of advanced wireless communications.
