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Updated: Sep 3, 2025

Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations
Published on: August 21, 2018
A General FEM Model for Analysis of Third-Order Nonlinearity in RF Surface Acoustic Wave Devices Based on
Baichuan Li1, Qiaozhen Zhang1, Xiangyong Zhao2
1College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China.
Abstract:
This article presents a general-purpose model that enables efficient and accurate calculation of third-order nonlinear signals in surface acoustic wave (SAW) devices. This model is based on piezoelectric constitutive equations combined with perturbation theory, which can be analyzed by full finite element method (FEM). For validation, third-order harmonic (H3) responses and intermodulation distortions (IMD3) in SAW resonators are simulated, and their calculation results fit well to experimental data in the literature. Then, the generation mechanisms of the third-order nonlinearity in SAW resonators are discussed. The dominant generation mechanisms for different nonlinear signals and the relation between electrode materials and H3 peak magnitude are revealed, which provides an important guideline for further nonlinear suppression.
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