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Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements
Huang Li1,2,3, Xiaoqiang Peng1,2,3, Chaoliang Guan1,2,3
1College of Intelligence Science, National University of Defense Technology, Changsha 410073, China.
Micromachines
|July 27, 2022
Summary
This study optimized convex spherical blazed gratings for spectrometers. The equal-along-projection layout and NiP-plated aluminum achieved higher diffraction efficiency and better surface quality.
Area of Science:
- Optics and Photonics
- Materials Science
- Precision Engineering
Background:
- Convex spherical blazed gratings are crucial optical components.
- Machining accuracy and material properties significantly impact diffraction efficiency.
- Existing fabrication methods require optimization for enhanced performance.
Purpose of the Study:
- To determine optimal structure size and machining accuracy for convex spherical blazed gratings.
- To analyze the influence of tool nose radius and Poisson burr on diffraction efficiency.
- To compare the performance of different workpiece materials (RSA6061 and RSA6061+NiP) for grating fabrication.
Main Methods:
- Utilized a four-axis ultra-precision machining system.
- Determined grating unit structure size and machining accuracy based on diffraction principles.
- Analyzed effects of tool nose radius and Poisson burr on diffraction efficiency.
- Compared grating performance using RSA6061 and RSA6061+NiP materials.
Main Results:
- Achieved a blaze angle error of 0.74% in the equal-along-projection layout.
- Obtained an average surface roughness below 5 nm, meeting processing requirements.
- The equal-along-projection layout demonstrated higher diffraction efficiency.
- RSA6061+NiP material exhibited superior performance regarding Poisson burr and surface roughness.
Conclusions:
- The equal-along-projection layout enhances diffraction efficiency due to improved blaze angle accuracy.
- RSA6061+NiP is a more suitable material for fabricating convex spherical blazed gratings for SWIR Offner-type spectrometers.
- Optimized machining parameters and material selection are key for high-performance blazed gratings.
Keywords:
Poisson burrblazed gratingsconvex spherical substrategrating layoutsmachining accuracyultraprecision
