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Signal processing techniques are essential for accurately converting continuous signals to digital formats and vice versa. When a continuous signal is sampled with a period T, the resulting sampled signal exhibits replicas of the original spectrum in the frequency domain, spaced at intervals equal to the sampling frequency. To handle this sampled signal, a zero-order hold method can be applied, which creates a piecewise constant signal by retaining each sample's value until the next...
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Related Experiment Video

Updated: Sep 3, 2025

Implementation of a Reference Interferometer for Nanodetection
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Design and Implementation of a Subnanometer Heterodyne Interference Signal Processing Algorithm with a Dynamic

Qilin Zeng1,2, Zhengyi Zhao1,2, Xianming Xiong1,2

  • 1Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China.

Sensors (Basel, Switzerland)
|July 27, 2022
PubMed
Summary

A new dynamic filter algorithm improves subnanometer heterodyne interferometry by reducing noise and enhancing signal processing. This method achieves high resolution, minimizing measurement errors for precise optical path measurements.

Keywords:
dynamic filterelectronic segmentationheterodyne interference signal processing algorithmsprecision measurement

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Area of Science:

  • Optical Metrology
  • Signal Processing
  • Interferometry

Background:

  • Heterodyne interferometry is crucial for high-precision measurements but susceptible to noise.
  • Low signal-to-noise ratio (SNR) in measurement signals complicates accurate data acquisition.
  • Conventional algorithms struggle with amplitude variations and frequency uncertainties in dual-frequency lasers.

Purpose of the Study:

  • To propose a subnanometer heterodyne interference signal processing algorithm incorporating a dynamic filter.
  • To enhance measurement accuracy by mitigating noise from optical paths and circuits.
  • To analyze the effectiveness of the bi-quadrature lock-in amplifier algorithm in complex scenarios.

Main Methods:

  • Development of a dynamic filter with variable coefficients to handle low SNR signals.
  • Analysis of the bi-quadrature lock-in amplifier algorithm's role in addressing signal amplitude and frequency differences.
  • Experimental validation using a heterodyne interferometry platform to compare proposed and conventional algorithms.

Main Results:

  • The proposed algorithm significantly reduces measurement errors caused by noise.
  • Maximum deviation in phase increment does not exceed 6 mrad.
  • Achieved a system resolution of 0.15 nm with single-cycle phase difference subdivision of 1024.

Conclusions:

  • The dynamic filter algorithm effectively improves the precision of subnanometer heterodyne interferometry.
  • The method demonstrates superior performance in reducing noise and enhancing resolution compared to conventional approaches.
  • This algorithm offers a robust solution for high-accuracy displacement and position measurements.