Large-Scale Ultrafast Strain Engineering of CVD-Grown Two-Dimensional Materials on Strain Self-Limited Deformable...

Strain engineering of 2D materials is capable of tuning the electrical and optical properties of the materials without introducing additional atoms. Here, a method for large-scale ultrafast strain engineering of CVD-grown 2D materials is proposed. Locally nonuniform strains are introduced through the cooperative deformation of materials and metal@metal oxide nanoparticles through cold laser shock. The tensile strain of MoS₂ changes and the band gap decreases after laser shock. The mechanism of the ultrafast straining is investigated by MD simulations. MoS₂ FETs were fabricated, and the field-effect mobility of devices could be increased from 1.9 to 44.5 cm² V^-1 s^-1 by adjusting the strain level of MoS₂. This is currently the maximum value of MoS₂ FETs grown by CVD with SiO₂ as the dielectric. As a large-scale and ultrafast manufacturing method, laser shock provides a universal strategy for large-scale adjustment of 2D material strain, which will help to promote the manufacturing of 2D nanoelectronic devices.