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Dual Band MEMS Directional Acoustic Sensor for Near Resonance Operation.

Fabio Alves¹, Renato Rabelo¹, Gamani Karunasiri¹

¹Department of Physics, Naval Postgraduate School, Monterey, CA 93943, USA.

Sensors (Basel, Switzerland)

|August 12, 2022

Summary

This study presents a novel microelectromechanical systems (MEMS) directional sensor inspired by the Ormia ochracea fly. It achieves high signal-to-noise ratio and selectable frequency responses for diverse applications.

Keywords:

MEMS sensor acoustic sensor bio-inspired resonant sensors

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Area of Science:

Bio-inspired engineering
Microelectromechanical systems (MEMS)
Acoustic sensing

Background:

The parasitic fly Ormia ochracea possesses a unique tympana structure enabling exceptional directional hearing.
Existing directional sensors often require complex signal processing or have limited frequency selectivity.
Biomimetic approaches offer potential for novel sensor designs with enhanced performance.

Purpose of the Study:

To design and characterize a MEMS directional sensor mimicking the Ormia ochracea tympana.
To achieve tunable frequency responses and high signal-to-noise ratio (SNR).
To explore the sensor's potential for applications requiring precise directional sound detection.

Main Methods:

Fabrication of a MEMS device with asymmetric coupled bridged membranes to excite independent vibrational modes.
Transduction of mechanical vibrations into differential capacitance and then voltage signals via charge amplifiers.
Characterization of sensor performance, including sensitivity, frequency response, and noise.

Main Results:

Demonstrated excitation of two independent bending vibrational modes by breaking membrane symmetry.
Achieved mechanical sensitivity of approximately 6 μm/Pa and electrical sensitivity of 13 V/Pa at resonance.
Identified sensor die as the primary noise source, with a computed average SNR of 91 dB in the passband.
Exhibited four distinct frequency characteristics and an accurate dipole-like directional response.

Conclusions:

The bio-inspired MEMS directional sensor successfully mimics the Ormia ochracea tympana for enhanced directional hearing.
The sensor design allows for selectable frequency responses and high SNR, suitable for demanding applications.
Further development could lead to advanced acoustic sensing technologies with improved performance and versatility.