Directional Multi-Resonant Micro-Electromechanical System Acoustic Sensor for Low Frequency Detection

This paper reports on the design, modeling, and characterization of a multi-resonant, directional, MEMS acoustic sensor. The design builds on previous resonant MEMS sensor designs to broaden the sensor's usable bandwidth while maintaining a high signal-to-noise ratio (SNR). These improvements make the sensor more attractive for detecting and tracking sound sources with acoustic signatures that are broader than discrete tones. In-air sensor characterization was conducted in an anechoic chamber. The sensor was characterized underwater in a semi-anechoic pool and in a standing wave tube. The sensor demonstrated a cosine-like directionality, a maximum acoustic sensitivity of 47.6 V/Pa, and a maximum SNR of 88.6 dB, for 1 Pa sound pressure, over the bandwidth of the sensor circuitry (100 Hz-3 kHz). The presented design represents a significant improvement in sensor performance compared to similar resonant MEMS sensor designs. Increasing the sensitivity of a single-resonator design is typically associated with a decrease in bandwidth. This multi-resonant design overcomes that limitation.