Ultra-high-resolution quanta image sensor with reliable photon-number-resolving and high dynamic range capabilities

Area of Science:

• Solid-state imaging technology
• Photonics and optical sensors
• Advanced semiconductor devices

Background:

• Traditional charge-coupled devices (CCD) and complementary metal-oxide-semiconductor (CMOS) sensors have limitations in low-light and high dynamic range (HDR) imaging.
• The quanta image sensor (QIS) concept, proposed in 2005, aims to overcome these limitations with photon-number-resolving capabilities.
• Achieving ultra-high pixel resolution alongside reliable photon-number resolving and HDR has been a significant challenge in image sensor development.

Purpose of the Study:

• To present a novel 163-megapixel quanta image sensor (QIS) capable of both reliable photon-number resolving and high dynamic range (HDR) imaging.
• To demonstrate the highest pixel resolution reported to date for low-noise image sensors with photon-number-resolving capability.
• To detail the design, operating principles, and experimental validation of this advanced QIS device.

Main Methods:

• Fabrication of a 163-megapixel QIS using a standard, state-of-the-art CMOS process.
• Implementation of 2-layer wafer stacking and backside illumination techniques.
• Characterization of photon-number resolving capability and dynamic range performance.

Main Results:

• Demonstrated reliable photon-number resolving with an average read noise of 0.35 e- rms at room temperature.
• Achieved a dynamic range of 95 dB, attributed to the extremely low noise floor and extended full-well capacity (20k e-).
• The developed QIS exhibits the highest pixel resolution among low-noise, photon-number-resolving image sensors.

Conclusions:

• The presented 163 MP QIS successfully integrates reliable photon-number resolving and high dynamic range imaging.
• This device offers industry-leading low-light imaging performance and sets a new benchmark for pixel resolution in its class.
• The findings pave the way for next-generation image sensors with superior imaging capabilities over existing CCD and CMOS technologies.