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Updated: Aug 31, 2025

A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
Atomic transistors based on seamless lateral metal-semiconductor junctions with a sub-1-nm transfer length
Seunguk Song1,2, Aram Yoon1,3, Jong-Kwon Ha4
1Department of Materials Science and Engineering & Center for Future Semiconductor Technology (FUST), Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, Republic of Korea.
Researchers developed a scalable method for creating stable, low-resistance edge contacts in two-dimensional (2D) transistors using platinum telluride (PtTe2) and molybdenum disulfide (MoS2). This innovation enhances device performance by enabling seamless atomic interfaces and reducing Schottky barriers.
Area of Science:
- Materials Science
- Nanotechnology
- Solid-State Physics
Background:
- Two-dimensional (2D) transistors offer potential for miniaturization, but achieving high-quality, stable edge contacts remains a challenge.
- Existing metal-semiconductor junctions (MSJs) in 2D devices often suffer from thermal and chemical instability, hindering reproducible performance.
- The development of robust edge contacts is crucial for advancing 2D electronic devices.
Purpose of the Study:
- To present a scalable synthetic strategy for fabricating low-resistance edge contacts in 2D transistors.
- To utilize a thermally stable 2D metal, platinum telluride (PtTe2), as an epitaxial template for controlled material growth.
- To demonstrate improved device performance through novel PtTe2-MoS2 metal-semiconductor junctions.
Main Methods:
- Fabrication of edge-to-edge connected metal-semiconductor junctions (MSJs) using PtTe2 as a template.
- Epitaxial growth of monolayer molybdenum disulfide (MoS2) laterally onto PtTe2.
- Characterization of the PtTe2-MoS2 interface and assessment of electrical properties, including contact resistivity and Schottky barrier height.
- Utilizing conventional lithography for position-selected growth of PtTe2-MoS2 MSJ arrays.
Main Results:
- Achieved low-resistance edge contacts to 2D atomic transistors using a PtTe2-MoS2 metal-semiconductor junction.
- The PtTe2 template enabled the lateral growth of MoS2, forming a seamless atomic interface.
- Synthesized lateral heterojunctions exhibited reduced Schottky barrier dimensions and enhanced carrier injection compared to vertical contacts.
- Demonstrated wafer-scale fabrication of PtTe2-MoS2 MSJ arrays with high processability, low contact resistivity, and ultrashort transfer length.
Conclusions:
- The developed scalable synthetic strategy enables the reproducible fabrication of high-quality, low-resistance edge contacts for 2D transistors.
- The use of thermally stable PtTe2 as an epitaxial template is key to achieving seamless atomic interfaces and improved device performance.
- This approach facilitates the design of advanced 2D electronic devices with enhanced processability and superior electrical characteristics.
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