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Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

Yilin Qu1, Feng Jin1, Jiashi Yang2

  • 1State Key Laboratory for Strength and Vibration of Mechanical Structures, Xi'an Jiaotong University, Xi'an 710049, China.

Micromachines
|August 26, 2022
PubMed

Keywords:
beamflexoelectricgyroscopevibration

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