Mechanical Characterization and Analysis of Different-Type Polyimide Feedthroughs Based on Tensile Test and FEM

Seonho Seok1, HyungDal Park2,3, Yong-Jun Kim3

  • 1Center for Nanoscience and Nanotechnology (C2N), University-Paris-Saclay, 91400 Orsay, France.

Micromachines
|August 26, 2022
PubMed