Implementation of a Fuzzy Inference System to Enhance the Measurement Range of Multilayer Interferometric Sensors

Area of Science:

• Sensor Technology
• Optical Metrology
• Fuzzy Logic Systems

Background:

• Interferometric sensors face measurement ambiguity due to spectral fringe analysis.
• This ambiguity limits sensor measurement range to one free spectral range (FSR).

Purpose of the Study:

• To develop a novel fuzzy inference system (FIS) methodology.
• To overcome measurement ambiguity in interferometric sensors.
• To extend the effective measurement range of interferometric sensors.

Main Methods:

• Implementation of a fuzzy inference system (FIS).
• Application of the FIS to temperature interferometric sensors.
• Experimental validation of the extended measurement range.

Main Results:

• Successfully overcame ambiguity over multiple FSR periods.
• Quintupled the measurement range of one temperature sensor (MAE = 0.0045 °C).
• Doubled the measurement range of a second temperature sensor (MAE = 0.0073 °C).

Conclusions:

• The proposed FIS methodology effectively extends interferometric sensor measurement ranges.
• The method significantly enhances sensor performance for applications like temperature sensing.
• Demonstrated practical viability and accuracy through experimental validation.