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High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure
Liang Lei1, Bo Dong1, Yuxuan Hu1
1College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China.
Sensors (Basel, Switzerland)
|September 9, 2022
Summary
This study presents a high-frequency surface acoustic wave (SAW) resonator using a novel sandwiched interdigital transducer (IDT) structure. The new design significantly enhances performance for advanced electronic devices.
Area of Science:
- Materials Science
- Electrical Engineering
- Acoustics
Background:
- Surface Acoustic Wave (SAW) devices are crucial for high-frequency signal processing.
- Traditional SAW resonators face limitations in operating frequency and performance.
Purpose of the Study:
- To develop a high-frequency SAW resonator with improved performance.
- To investigate the efficacy of a novel sandwiched interdigital transducer (IDT) structure.
Main Methods:
- Fabrication of a SAW resonator with a diamond/AlN/IDT/AlN/diamond structure on a silicon substrate.
- Analysis of the resonator's acoustic wave propagation characteristics and electromechanical properties.
Main Results:
- The sandwiched IDT structure significantly improved phase velocity and electromechanical coupling coefficient compared to traditional designs.
- Achieved an operating frequency of 6.15 GHz with an electromechanical coupling coefficient of 5.53% and phase velocity of 12,470 m/s.
- Observed a temperature coefficient of frequency of -6.3 ppm/°C.
Conclusions:
- The novel sandwiched structure offers a promising design for high-performance, high-frequency SAW devices.
- This advancement paves the way for next-generation wireless communication and sensing technologies.
