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Updated: Aug 27, 2025

Three-dimensional Optical-resolution Photoacoustic Microscopy
Published on: May 3, 2011
A monolithic three-dimensional thermal convective acoustic vector sensor with acoustic-transparent heat sink
Xiang-Yuan Xu1, Hao Ge2, Jing Zhao1
1Key Laboratory of Noise and Vibration Research, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, People's Republic of China.
Abstract:
An acoustic vector sensor can directly detect acoustic particle velocity based on the measured temperature difference between closely spaced heated wires. For the detection of velocity in three dimensions, an integrated three-dimensional (3 D) sensor is desired, but it remains challenging in MEMS (Micro-Electro-Mechanical System) manufacturing. Here, a novel monolithic 3 D acoustic vector sensor is proposed, which is constructed using in-plane distributed wires assembled with acoustically transparent heat sink. The planar MEMS structure of the proposed sensor makes it easy to be fabricated and packaged. This work offers a new method for the design of acoustic vector sensors and other thermal convection-based MEMS sensors.
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