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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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Single-shot off-axis digital holographic system with extended field-of-view by using multiplexing method.

Manoj Kumar¹, Lavlesh Pensia^1,2, Raj Kumar^3,4

¹CSIR-Central Scientific Instruments Organisation, Sector 30C, Chandigarh, 160030, India.

Scientific Reports

|September 30, 2022

Summary

A novel digital holographic system doubles the field-of-view (FOV) using a Fresnel bi-prism for enhanced imaging. This single-shot method captures more object information, benefiting microscopy and metrology.

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Area of Science:

Optics and Photonics
Digital Holography
Image Processing

Background:

Off-axis digital holography systems, like the Mech-Zehnder type, have limitations in their field-of-view (FOV).
Expanding the FOV is crucial for detailed imaging in applications such as microscopy and optical metrology.

Purpose of the Study:

To introduce a new single-shot off-axis digital holographic system configuration.
To achieve double the camera field-of-view (FOV) compared to existing setups.

Main Methods:

A Fresnel bi-prism is inserted into the object beam to divide it into two paths.
Each path carries different object information and is modulated with distinct spatial carrier frequencies.
The image sensor records the overlapped wavefronts from both paths simultaneously in a single shot.

Main Results:

The proposed system successfully demonstrated double the FOV through experimental imaging of a resolution test target.
The multiplexed hologram contained two interferometric images corresponding to two different FOVs.
The feasibility of the digital holographic system was experimentally verified.

Conclusions:

The developed digital holographic system effectively doubles the FOV using spatial frequency multiplexing.
The system shows promise for applications in microscopy and optical metrology.
Limitations were identified, and methods for overcoming them were discussed.