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Updated: Aug 26, 2025

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
Published on: December 21, 2015
Antireflective film of porous silica
Abstract:
We aimed to strengthen the antireflection coating of low refractive index, by using spinodal porous films based on phase separation of sodium borosilicate glass. Coating films were prepared by printing a glass paste onto a silica substrate, and melting at temperatures from 900°C to 1000°C, allowing phase separation at 600°C and finally etching to porosities of ∼60%. Coating with reflections as low as 0.5% was achieved, which consisted of a homogeneous porous layer of several micrometers in thickness and a graded region of up to 400 nm in width at the interface with the substrate. As to the optical property, simulations based on three-layer and two-layer models were carried out, into which was incorporated a term expressing mutual coherence degree between reflections from the surface and interface with coherence length of the light source.
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