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Updated: Aug 26, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Linewidth considerations for MEMS tunable VCSEL LiDAR.

Bart Johnson, Joey Jabbour, Mark Malonson

    Optics Express
    |October 12, 2022
    PubMed
    Summary
    This summary is machine-generated.

    Thermal vibrations in MEMS tunable VCSEL membranes limit laser linewidth. Advanced LiDAR and OCT systems overcome this by measuring clock signals, enabling precise measurements.

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    Area of Science:

    • Optics and Photonics
    • Microelectromechanical Systems (MEMS)

    Background:

    • Flexible membranes in MEMS tunable VCSELs are susceptible to thermally induced vibrations.
    • These vibrations can negatively impact laser performance and introduce a theoretical linewidth floor.

    Purpose of the Study:

    • To measure the thermal vibration spectrum of MEMS tunable VCSEL membranes.
    • To investigate the impact of these vibrations on laser linewidth.
    • To explore methods for overcoming the linewidth limitation in LiDAR and OCT systems.

    Main Methods:

    • Measured the thermal vibration spectrum of a flexible membrane used in MEMS tunable VCSELs.
    • Identified resonant frequencies corresponding to spatial vibration modes.
    • Analyzed the feasibility of using frequency domain LiDAR and optical coherence tomography (OCT) with clock measurement for linewidth reduction.

    Main Results:

    • Observed distinct peaks in the thermal vibration spectrum at the membrane's resonant frequencies.
    • Established that these vibrations impose a theoretical limit on VCSEL linewidth.
    • Demonstrated that frequency domain LiDAR/OCT systems with clock measurement can mitigate this linewidth limitation.

    Conclusions:

    • Thermally induced membrane vibrations are a critical factor affecting VCSEL performance.
    • Frequency domain LiDAR and OCT systems offer a viable feed-forward approach to reduce linewidth limitations.
    • Low-frequency membrane resonances facilitate linewidth reduction strategies in advanced optical systems.