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Updated: Aug 25, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
High-Acceleration Vibration Calibration System Based on Phase-Locked Resonance Control
Ran Cheng1, Zhihua Liu2, Guodong Zhai1
1School of Mechanical, Electronic and Information Engineering, China University of Mining and Technology, Beijing 100083, China.
Abstract:
In order to ensure the measurement accuracy of high-acceleration vibration sensors used in engineering applications, it is necessary to calibrate their key performance parameters at high acceleration. The high-acceleration vibration calibration system produces high-acceleration vibration by utilizing the resonance amplification principle; however, the resonance frequency of the resonant beam changes with increasing amplitude, affected by the influences of nonlinear and other factors. In this study, a phase-locked resonance tracking control method based on the phase resonance principle is proposed to accurately and quickly track the resonance frequency of the resonant beam, which can improve the accuracy and stability of resonance control. The resonant beam is able to produce stable vibration with an amplitude exceeding 7500 m/s2 by phase-locking and tracking the resonant frequency. A calibration system built with this method can provide stable vibration with an amplitude of 500-10,000 m/s2 in the range of 80-4000 Hz. Comparison experiments with the commonly used amplitude iteration amplification method demonstrate that the proposed method can give an acceleration stability control index of less than 0.5% and a resonance tracking time of less than 0.1 s.
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