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Updated: Aug 25, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Optimal Compensation of MEMS Gyroscope Noise Kalman Filter Based on Conv-DAE and MultiTCN-Attention Model in Static
Zimin Huo1,2, Fuchao Wang3, Honghai Shen3
1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
Abstract:
Errors in microelectromechanical systems (MEMS) inertial measurement units (IMUs) are large, complex, nonlinear, and time varying. The traditional noise reduction and compensation methods based on traditional models are not applicable. This paper proposes a noise reduction method based on multi-layer combined deep learning for the MEMS gyroscope in the static base state. In this method, the combined model of MEMS gyroscope is constructed by Convolutional Denoising Auto-Encoder (Conv-DAE) and Multi-layer Temporal Convolutional Neural with the Attention Mechanism (MultiTCN-Attention) model. Based on the robust data processing capability of deep learning, the noise features are obtained from the past gyroscope data, and the parameter optimization of the Kalman filter (KF) by the Particle Swarm Optimization algorithm (PSO) significantly improves the filtering and noise reduction accuracy. The experimental results show that, compared with the original data, the noise standard deviation of the filtering effect of the combined model proposed in this paper decreases by 77.81% and 76.44% on the x and y axes, respectively; compared with the existing MEMS gyroscope noise compensation method based on the Autoregressive Moving Average with Kalman filter (ARMA-KF) model, the noise standard deviation of the filtering effect of the combined model proposed in this paper decreases by 44.00% and 46.66% on the x and y axes, respectively, reducing the noise impact by nearly three times.
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