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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

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Process method of Si₃N₄ ceramic brazing sealed cavity for high-temperature application.

Chen Li^1,2,3, Zhihong Fang^1,2, Boshan Sun^2,3

¹Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China.

Frontiers in Chemistry

|October 14, 2022

Summary

This study presents a novel method for creating high-temperature vacuum-sealed cavities using silicon nitride (Si3N4) ceramic and advanced brazing techniques. The developed sealed cavities demonstrate excellent bonding strength and stability in extreme thermal conditions.

Keywords:

Si3N4 ceramic brazing interface high temperature sealed cavity vacuum brazing

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Last Updated: Aug 25, 2025

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

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Published on: January 9, 2014

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Published on: October 10, 2014

Area of Science:

Materials Science
Ceramic Engineering
Vacuum Technology

Background:

Silicon nitride (Si3N4) ceramics are crucial for high-temperature applications.
Developing robust vacuum-sealed cavities for extreme environments remains a challenge.
Existing sealing methods often fail under high thermal stress.

Purpose of the Study:

To develop a reliable vacuum-sealed cavity using Si3N4 ceramic suitable for high-temperature environments.
To investigate the bonding strength and thermal stability of the prepared sealed cavities.
To enable the development of high-temperature pressure sensors.

Main Methods:

Utilized vacuum brazing and chemical reaction at 1,100°C and 0.5 MPa.
Employed Si3N4 ceramic polishing, thinning, and inductively coupled plasma etching.
Applied high-temperature metal filler (Ti-Zr-Cu-Ni) brazing process.

Main Results:

Successfully prepared a vacuum-sealed Si3N4 ceramic cavity.
Characterization via SEM and EDS confirmed intact cavity structure and well-bonded Si3N4 ceramics.
Bonding interface strength exceeded 5.13 MPa and remained stable at 1,000-1,100°C for 1 hour.

Conclusions:

The proposed vacuum brazing method effectively creates durable Si3N4 ceramic sealed cavities.
The sealed cavities exhibit exceptional thermal stability, suitable for high-temperature applications.
This technique paves the way for manufacturing high-temperature resistant pressure sensors.