Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source

Area of Science:

• Optics and Imaging
• Materials Science
• Physics

Background:

• Ptychography is a powerful lensless imaging technique.
• High harmonic generation (HHG) provides tunable, coherent extreme ultraviolet (EUV) light.
• Current EUV imaging methods face limitations in speed and throughput.

Purpose of the Study:

• To implement and demonstrate temporally multiplexed multibeam ptychography in the EUV.
• To enable simultaneous imaging of multiple sample areas or the same area under varied conditions.
• To integrate wavelength multiplexing for advanced spectroscopic imaging.

Main Methods:

• Utilized a high harmonic based light source for EUV generation.
• Implemented temporal multiplexing to control multiple beams.
• Combined temporal multiplexing with wavelength multiplexing for spectroscopic capabilities.

Main Results:

• Successfully demonstrated the first temporally multiplexed multibeam ptychography in the EUV.
• Achieved simultaneous imaging of different sample regions or the same region at different times/angles.
• Showcased compatibility with wavelength multiplexing for spectroscopic analysis.

Conclusions:

• The developed technique significantly increases data throughput.
• The method offers a simple experimental setup with high photon efficiency.
• This advancement leverages the unique properties of HHG light sources for enhanced EUV imaging.