Design and collaborative optimization method of multilayer coatings to correct polarization aberration of optical...

Multilayer coatings induce a significant polarization aberration in optical systems with high numerical aperture (NA) and wide field of view, which will cause wavefront distortion and imaging degradation. Studies have used low-polarization coatings (LPC) design to reduce the coating-induced polarization aberration. However, the polarization aberration caused by LPC remain evident in systems with large incident angles and many coated surfaces. In this paper, a hybrid optimization algorithm (HOA) is proposed to enhance the design accuracy of LPC. Based on the HOA, a collaborative optimization method is developed to simultaneously design coatings with different polarization properties for multiple surfaces, which can correct polarization aberration by mutual compensation between the coated surfaces and other optical elements in a single system. Finally, a high NA lithographic lens is simulated as an example to verify the collaborative optimization method. The simulation demonstrates that this method is superior to conventional methods. This research provides a new way to correct the polarization aberration and is applicable to any systems coated with multilayer coatings.