Search research articles

ABOUT JoVE

Overview Leadership Blog JoVE Help Center

AUTHORS

Publishing Process Editorial Board Scope & Policies Peer Review FAQ Submit

LIBRARIANS

Testimonials Subscriptions Access Resources Library Advisory Board FAQ

RESEARCH

JoVE Journal Methods Collections JoVE Encyclopedia of Experiments Archive

EDUCATION

JoVE Core JoVE Business JoVE Science Education JoVE Lab Manual Faculty Resource Center Faculty Site

Terms & Conditions of Use

Search research articles

Related Experiment Video

Updated: Aug 25, 2025

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Published on: April 4, 2017

Point diffraction interferometer based on a silicon nitride waveguide spherical wave source.

Yingze Xue, Yuankai Chen, Yongying Yang

|October 18, 2022

Summary

This summary is machine-generated.

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by

Same author

Molecular residual disease-based novel modality of postoperative management for non-small-cell lung cancer (REMODEL): Protocol for a prospective multicenter study.

Journal of translational internal medicine·2026

Same author

Heterologous Expression Unexpectedly Activates the Host Cryptic Genes in <i>Aspergillus nidulans</i> and Enables the Discovery of Novel Natural Products.

Journal of fungi (Basel, Switzerland)·2026

Same author

Dancing on Electrodes: Wearable Continuous Multiplexed Monitoring for Daily Diabetic Nephropathy Management.

ACS nano·2026

Same author

Evaluation model for in-situ pyrolysis development potential of tar-rich coal based on fuzzy analysis, combined weighting, and grey-TOPSIS.

Scientific reports·2026

Same author

Real-time minimalist imaging via spatial aberration uniformization and re-parameterized restoration.

Optics express·2026

Same author

Ronchi lateral shearing interferometry with binary encoded sinusoidal transmittance grating.

Optics express·2026

Same journal

Multifunctional reconfigurable terahertz metasurface based on vanadium dioxide phase transition: achieving broadband absorption and efficient polarization conversion.

Applied optics·2026

Same journal

High-Q-factor electromagnetically induced transparency utilizing quasi-bound states in the continuum in an all-dielectric terahertz metasurface.

Applied optics·2026

Same journal

Automated stitching interferometry for high-precision metrology of X-ray mirrors.

Applied optics·2026

Same journal

Experimental demonstration of an approach to designing a metal-dielectric DBR resonant cavity structure.

Applied optics·2026

Same journal

High-precision wavefront reconstruction from a single-shot interferogram using a physics-driven hybrid feature calibration network.

Applied optics·2026

Same journal

Ultra-high-Q Fano resonance based on coupled topological corner states in Kagome photonic crystals.

Applied optics·2026

See all related articles

A novel silicon nitride waveguide point diffraction interferometer (WG-PDI) offers high-accuracy spherical surface testing. This advanced system overcomes limitations of existing spherical wave sources, enabling precise measurements for optical components.

Area of Science:

Optical Engineering
Nanotechnology
Interferometry

Background:

Existing spherical wave sources for interferometry have limitations in accuracy and numerical aperture.
Pinhole diffraction interferometers in reflected configurations can introduce systematic errors due to lateral deviation.

Purpose of the Study:

To propose and analyze a silicon nitride waveguide point diffraction interferometer (WG-PDI) for spherical surface testing.
To develop a waveguide spherical wave source (WG-SWS) capable of generating high-accuracy, high numerical aperture spherical reference waves.
To eliminate lateral deviation errors in point diffraction interference.

Main Methods:

Theoretical description of the WG-PDI and analysis of potential errors.
Development of a silicon nitride waveguide spherical wave source (WG-SWS) with Si substrate and SiO2 cladding.

More Related Videos

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Related Experiment Videos

Last Updated: Aug 25, 2025

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Published on: April 4, 2017

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Coating a semi-reflective film on the WG-SWS output facet to achieve deviation-free point diffraction interference.

Main Results:

The WG-PDI successfully generates a high-accuracy spherical reference wave.
The semi-reflective film effectively eliminates lateral deviation errors.
Experimental measurements of spherical surface errors by WG-PDI show excellent agreement with ZYGO interferometer results.

Conclusions:

The proposed WG-PDI is a viable and accurate method for spherical surface testing.
The WG-SWS provides a superior spherical reference wave compared to existing sources.
This technology offers a promising solution for high-precision optical metrology.