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Juntao Zhang, Bo Pan, Huan Liu

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    A new high-accuracy method measures parallelism in nontransparent flat parts, crucial for precision physics and aerospace. This technique achieves submicrometer-level precision, overcoming limitations of existing measurement systems.

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    Area of Science:

    • Metrology
    • Mechanical Engineering
    • Materials Science

    Background:

    • Nontransparent flat parts with low rigidity are essential in precision physics experiments and aerospace.
    • Existing parallelism measurement methods lack the required accuracy and size capabilities for these applications.

    Purpose of the Study:

    • To develop a novel, high-accuracy method for measuring the parallelism of nontransparent flat parts.
    • To establish a submicrometer-level parallelism measurement system.

    Main Methods:

    • Reconstructing a 3D model of the part using measured thickness and flatness.
    • Evaluating parallelism based on the principle of minimum directional zone.
    • Developing a submicrometer-level parallelism measurement system.

    Main Results:

    • Successfully measured the parallelism of a thin copper substrate (∅200mm×2.48mm) to be 7.41 µm.
    • The parallelism measurement system demonstrated an expanded uncertainty of 0.34 µm (k=2).

    Conclusions:

    • The proposed method effectively measures parallelism in nontransparent flat parts with high accuracy.
    • The developed system achieves submicrometer-level precision, meeting critical industry needs.