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Related Experiment Videos

Solid-state micro sensors.

M Esashi, T Matsuo

    Medical Progress Through Technology
    |January 1, 1987
    PubMed
    Summary
    This summary is machine-generated.

    Solid state micro sensors utilize semiconductor micromachining for biomedical applications. Research in Japan focuses on advanced chemical and physical sensors, including ion-sensitive field-effect transistors (ISFETs) and pressure sensors.

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    Area of Science:

    • Materials Science
    • Biomedical Engineering
    • Electrical Engineering

    Background:

    • Solid-state micro sensors are crucial for advanced biomedical instrumentation.
    • Japan has been a leader in developing micro sensor technology.

    Purpose of the Study:

    • To review recent research on solid-state micro sensors in Japan.
    • To highlight advancements in chemical and physical sensors for quantitative analysis.

    Main Methods:

    • Review of recent research activities.
    • Application of semiconductor technology (micromachining).

    Main Results:

    • Development of miniaturized sensors for catheter use.
    • Creation of integrated sensing systems and multi-sensor devices.

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  • Advancements in ion-sensitive field-effect transistors (ISFETs) for ion, biosensing, and dissolved gas detection.
  • Focus on pressure sensors for in-vivo measurements, such as in blood vessels.

    • Conclusions:

    • Micromachining enables highly integrated and miniaturized solid-state micro sensors.
    • ISFETs and pressure sensors represent significant progress in biomedical sensing.