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Dynamic Modeling and Attitude Decoupling Control for a 3-DOF Flexible Piezoelectric Nano-Positioning Stage Based on

Ning Chen1,2, Xianfu Liu3

  • 1College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qingdao 266590, China.

Micromachines
|October 27, 2022
PubMed

Keywords:
nano-positioningnano-positioning stagepiezoelectricpiezoelectric–mechanical couplingsmart composite structure

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