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Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices

Shen Bin1, Haiyang Yang1, Leiming Jiang1

  • 1School of Safety Engineering, Heilongjiang University of Science and Technology, Harbin 150022, China.

Micromachines
|October 27, 2022
PubMed

Keywords:
COMSOLSAW gas sensorforked-finger electrodesensitive filmunidirectional forked-finger transducer

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