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Research on Continuous Error Compensation of a Sub-Arc-Second Macro/Micro Dual-Drive Rotary System
Manzhi Yang1, Linyue Li1, Chuanwei Zhang1
1College of Mechanical Engineering, Xi'an University of Science and Technology, No. 58 Yanta Middle Road, Xi'an 710054, China.
A novel macro/micro dual-drive rotary system significantly enhances precision by compensating for motion errors. This ultra-precision system achieves sub-arc-second accuracy, reducing positioning errors by over 95%.
Area of Science:
- Mechanical Engineering
- Precision Engineering
- Control Systems
Background:
- Ultra-precision rotary systems are crucial for advanced scientific and industrial applications.
- Existing systems often face limitations in achieving sub-arc-second accuracy due to inherent errors.
- Macro/micro dual-drive systems offer a promising approach to overcome these limitations.
Purpose of the Study:
- To design and experimentally validate a sub-arc-second macro/micro dual-drive rotary system.
- To develop and implement a continuous error compensation scheme for enhanced positioning accuracy.
- To investigate the effectiveness of macro/micro compensation in reducing system errors.
Main Methods:
- A macro-drive system utilizing a direct-drive motor and a micro-drive system with piezoelectric ceramic actuation were integrated.
- A closed-loop control system was established using circular grating feedback for macro/micro output turntable displacement.
- System error modeling and continuous error compensation schemes were designed and applied.
Main Results:
- The macro/micro dual-drive system achieved sub-arc-second (0.1 arcsecond) positioning accuracy.
- Macro/micro compensation reduced repeated positioning error by 78.8% and positioning error by 95.2%.
- Experimental tests verified the system's design, error compensation strategy, and control method.
Conclusions:
- The designed macro/micro dual-drive rotary system effectively achieves ultra-precision positioning.
- The continuous error compensation strategy is validated as a successful method for enhancing accuracy.
- This research provides valuable insights for advancing ultra-precision macro/micro dual-drive technology.
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